Metal phosphate and fluoride catalysts active for hydrolysis of NF3

Abstract NF 3 was decomposed over various ortho, pyrophosphates and some fluorides at 450–600 K. Mn 2 P 2 O 7 and CePO 4 were the most active. The catalytic activity of Co 2 P 2 O 7 , Co 3 (PO 4 ) 2 , CrPO 4 , Cu 2 P 2 O 7 , and Cr 4 (P 2 O 7 ) 3 followed in this order. Zn 3 (PO 4 ) 2 and AlPO 4 were less active. Activity of pyrophosphate was comparable to that of ortho-phosphate. Products were NO 2 and a very small amount of N 2 O except for HF. An essential reaction was 2NF 3  + 3H 2 O → 6HF + NO + NO 2 . Catalytic activity of phosphates was proportional to not the amount but the concentration of surface hydroxyls, suggesting that the reaction proceeds via a bidentate surface intermediate.