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Characteristics of AZO Thin Film using RF and ICP power at Facing Magnetron Sputtering System
Characteristics of AZO Thin Film using RF and ICP power at Facing Magnetron Sputtering System
2013
Hye Ran Kim
Jay Bum Kim
Long Wen
Yoon-Seok Choi
Jeon G. Han
Keywords:
Thin film
Sputter deposition
Electronic engineering
Electrical engineering
Materials science
Engineering physics
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