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Distributed MEMS tunable phase shifters on CMOS technology for millimeter wave frequencies
Distributed MEMS tunable phase shifters on CMOS technology for millimeter wave frequencies
2011
G. Rehder
B. Blampey
T. Vo
P. Ferrari
Keywords:
CMOS
Materials science
Microelectromechanical systems
Extremely high frequency
Optoelectronics
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