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A Novel Multi-Fin DRAM Periphery Transistor Technology using a Spacer Transfer through Gate Polysilicon Technique
A Novel Multi-Fin DRAM Periphery Transistor Technology using a Spacer Transfer through Gate Polysilicon Technique
2008
Makoto Yoshida
Kyung Eun Kim
Jae-Rok Kahng
Choong-ho Lee
Hyunju Sung
Kyoung-Ho Jung
Joon-seok Moon
Wouns Yang
K.S. Oh
Keywords:
Nanotechnology
Transistor
Electronic engineering
Fin
Dram
Materials science
Optoelectronics
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