High efficiency silicon nitride surface grating couplers

Guillaume Maire,Laurent Vivien,Guillaume Sattler,Andrzej Kazmierczak,Benito Sanchez,Kristinn B. Gylfason,Amadeu Griol,Delphine Marris-Morini,Eric Cassan,Domenico Giannone,Hans Sohlström,Daniel Hill

High efficiency silicon nitride surface grating couplers

2008

Guillaume Maire
Laurent Vivien
Guillaume Sattler
Andrzej Kazmierczak
Benito Sanchez
Kristinn B. Gylfason
Amadeu Griol
Delphine Marris-Morini
Eric Cassan
Domenico Giannone
Hans Sohlström
Daniel Hill

High efficiency surface grating couplers for silicon nitride waveguides have been designed, fabricated, and characterized. Coupling efficiencies exceeding 60 % are reported at a wavelength of 1.31 ...

Keywords:

Silicon nitride
Optoelectronics
Refractive index
Diffraction grating
Waveguide
Grating
Optics
Wavelength
Physics
Coupling
surface grating
Diffraction efficiency

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