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S1107-1-4 Piezoelectric Pump Using Vibration of Thin Plate
S1107-1-4 Piezoelectric Pump Using Vibration of Thin Plate
2009
Nobuhiko Henmi
Hidekazu Hara
Ryo Oshima
Michihiko Tanaka
Keywords:
Piezoelectricity
Electronic engineering
PMUT
Materials science
Vibration
piezoelectric pump
Acoustics
Correction
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