A method of manufacturing a phosphor sheet, and the phosphor sheet of manufacturing equipment

Disclosed is a method for producing a phosphor sheet, wherein a phosphor layer free from luminance irregularity is formed on a sheet-like substrate. Also disclosed is an apparatus for producing a phosphor sheet. In the method for producing a phosphor sheet, an electrostatic chuck is attached to a substrate holder in a vacuum chamber and a phosphor layer is formed on a sheet-like substrate held by the electrostatic chuck. This method for producing a phosphor sheet is characterized in that a surface of the electrostatic chuck on the substrate side has a surface roughness Ra of not more than 10 µm.