Polishing abrasive grains, and a manufacturing method, polishing method, the polishing slurry and means

The present invention is a wet grinding method grinding material to be polished. Polishing slurry is made of abrasive grains dispersed in pure water. Mechanical polishing abrasive particles is to play a role in the chemical composition, or the frictional heat generated during polishing abrasive material from the reaction components and the like to all integrated into particles. Each component respectively hold inherent material properties of each component, directly bonded to each other by mechanical alloying treatment. When sapphire or silicon carbide or gallium nitride and other friction slurry used in this step, the grinding time significantly reduced than in the past, processing costs can be significantly improved. For high-quality polished surface. Reusable polishing abrasive grains in the polishing process. Since the pH of the slurry is about 3 to 9, the polishing operation does not affect the field environment, process waste liquid is also simple.