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Photoelectroscopic Study of Mn Barrier Layer on SiO 2 for Si Wafer Bonding Process
Photoelectroscopic Study of Mn Barrier Layer on SiO 2 for Si Wafer Bonding Process
2019
Nagata Takahiro
Tsumura Kazumichi
Nakamura Kenro
Uchida Kengo
Kawakita Jin
Chikyow Toyohiro
Higashi Kazuyuki
Keywords:
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Science, technology and society
Barrier layer
Optoelectronics
Imagination
Materials science
Wafer bonding
Chemical substance
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