Synthesis of AlOx thin films by atmospheric-pressure mist chemical vapor deposition for surface passivation and electrical insulator layers
2020
Aluminum oxide (AlOx) thin films were grown using aluminum acetylacetonate [Al(acac)3] as a source material with methanol and water as the solvent by mist chemical vapor deposition, while also expo...
Keywords:
- Correction
- Source
- Cite
- Save
- Machine Reading By IdeaReader
0
References
2
Citations
NaN
KQI