Properties of superconducting YBa/sub 2/Cu/sub 3/O/sub 7- delta / time films made at high deposition rates

High T/sub c/ and J/sub c/ YBa/sub 2/Cu/sub 3/O/sub 7- delta /, thin films were prepared by pulsed laser deposition using deposition rates up to 145 AA/s. It is demonstrated that the deposition rate is one of the important processing parameters for preparation of high-temperature superconducting thin films. At high deposition rates, outgrowths were found on the film surfaces as a result of island growth at the processing temperature needed for good film growth. It is concluded that smooth films can be deposited by choosing the right deposition temperature and deposition rate so that the film coalesces at the final thickness.