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Processing of contact materials using chemical vapor deposition
Processing of contact materials using chemical vapor deposition
1974
R. Ruthardt
G. Elssner
Keywords:
Thin film
Hybrid physical-chemical vapor deposition
Ion plating
Plasma processing
Electron beam physical vapor deposition
Deposition (phase transition)
Metallurgy
Plasma-enhanced chemical vapor deposition
Combustion chemical vapor deposition
Materials science
Composite material
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