Influence of bias voltage on morphology,phase and wear performance of magnetron sputtered CrTiAlN coatings

The effect of bias voltage on morphology,phase components and wear performance of CrTiAlN coating,which was deposited by closed field unbalanced magnetron sputtered ion plating technique,was studied.The results show that the morphology and phases of the coating as well as the tribological parameters such as fiction coefficient,hardness,adhesion and wear rates of the coating are varied with bias voltage.The minimum wear rate of the coating prapared in bias voltage of-75V is obtained.And the conclusion can be obtained that the key factor which the influences the wear performance of the coating is not its morphology but the phase components when the bias voltages are in the range of-65V to-85V.