lms on p-Si(100) substrate deposited by PFCVAD

In this study, ZnO lms were prepared on p-Si substrates using the pulsed ltered cathodic vacuum arc deposition (PFCVAD) method. We report the eect of annealing temperature on structural and optical properties. The crystallographic structure and the size of the crystallites in the lms were studied by means of X-ray diraction. The lms lms was observed at a laser power of 2 mW.