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2D Fluid Modeling of Ar Plasma in a 450 mm CCP Reactor
2D Fluid Modeling of Ar Plasma in a 450 mm CCP Reactor
2012
Won-Gyun Yang
Dae Ung Kim
Sin Jae Yu
Jeong-Hun Ju
Keywords:
Plasma
fluid modeling
Materials science
CFD-ACE+
Mechanics
Correction
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