Programmable microshutter selection masks in application to UV spectroscopy

We are developing a 2D programmable field masks for Mutli-Object Spectroscopy (MOS) in sparsely populated fields. The device is based on the microshutter array MEMS technology originally developed for JWST NIRSpec. A new fabrication process has been developed to actuate microshutter arrays electrostatically thus eliminating the need for the macroscopic mechanisms and improving the reliability and robustness of the device. The microshutters, made with silicon nitride membranes with a shutter pitch size of 100 μm x 200 μm, rotate on narrow torsion bars. The microshutters are actuated, latched, and addressed electrostatically by applying voltages to the electrodes on the microshutters and the adjacent walls of the array support grid. We have demonstrated the fabrication and operation of the pilot arrays and produced an integrated flight unit that was successfully used on the FORTIS (Far-UV Off Rowland-circle Telescope for Imaging and Spectroscopy) project for suborbital flight in 2019.