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Impacts of Dislocations on the Anisotropic Etching of Ge/Si for Suspended Ge Membrane
Impacts of Dislocations on the Anisotropic Etching of Ge/Si for Suspended Ge Membrane
2016
Chaowen Chen
Guangyang Lin
Xiaoling Lan
Ningli Chen
Cheng Li
Songyan Chen
Wei Huang
Hongkai Lai
Keywords:
Anisotropy
Crystallography
Membrane
Inorganic chemistry
Etching
Chemistry
Dislocation
anisotropic etching
Chemical engineering
Analytical chemistry
Correction
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