Optical elements based on silicon carbide and coatings for laser systems

This paper presents the results of process development concerning the creation of laser mirrors based on silicon carbide. Process methods have been developed for shaping large mirrors with a minimum weight of 30-40kg/m^2, and a process has been developed for depositing coatings on laser mirrors with working wavelengths from 193 nm to 10.6 µm. © 2004 Optical Society of America