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Characterisation of planar electrodes realised in planar microelectronic technology
Characterisation of planar electrodes realised in planar microelectronic technology
1996
Anca Varlan
Willy Sansen
Keywords:
Conductometry
Electrode
Electronic engineering
Electrical engineering
Microelectronics
Planar
Engineering
planar electrode
cell design
frequency characteristic
Electrical impedance
frequency dependence
Correction
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