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超高真空化學氣相沈積低溫新穎複晶矽薄膜電晶體的製作與可靠度之研究---子計畫I:化學氣相沈積系統成長低溫複晶矽薄膜電晶體及其在投影式液晶顯示器的應用
超高真空化學氣相沈積低溫新穎複晶矽薄膜電晶體的製作與可靠度之研究---子計畫I:化學氣相沈積系統成長低溫複晶矽薄膜電晶體及其在投影式液晶顯示器的應用
1999
zhangdingzhang
Ting-Changchang
Keywords:
Polycrystalline silicon
Thin-film transistor
Ultra-high vacuum
Combustion chemical vapor deposition
Composite material
Electronic engineering
Materials science
Metallurgy
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