Edge control in computer controlled optical polishing

In this paper, edge control algorithm is studied based on a modified removal function, a computer simulation program is written to provide information on edge figuring process. The reliability of the algorithm is confirmed by CCP polishing experiment. The experimental results appear to have good agreement with theoretical analysis, spherical surface with edge errors of 2.56(lambda) P-V ((lambda) equals 6328 angstrom) is polished for 1.5h, and the errors reduce to 0.89(lambda) P-V.© (1995) COPYRIGHT SPIE--The International Society for Optical Engineering. Downloading of the abstract is permitted for personal use only.