Optimization of CMOS Integrated Nanocrystalline SnO2 Gas Sensor Devices with Bimetallic Nanoparticles

Abstract We present gas sensor devices based on nanocrystalline SnO 2 films, which are integrated on CMOS fabricated micro-hotplate (μhp) chips. Bimetallic nanoparticles (NPs) such as PdAu, PtAu, and PdPt have been synthesized for optimizing the sensing performance of these sensors. We demonstrate that proper functionalization with PdAu-NPs leads to a strongly improved sensitivity to the toxic gas carbon monoxide while the cross sensitivity to humidity and carbon dioxide is almost completely suppressed, which is of high importance for real life environmental conditions. We also present μhp chips employing Through-Silicon-Via (TSV) technology, which are capable for flexible 3D-integration of different types of gas sensors to a multi-parameter nanosensor system. Such CMOS integrated systems are promising candidates for realizing smart sensor devices for consumer market applications.