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Effect of ion bombardment on the initial growth in low temperature poly-Si formation
Effect of ion bombardment on the initial growth in low temperature poly-Si formation
1998
Kaeko Murata
Kazuya Kamiya
Ryouichi Nozawa
Masaaki Ito
Masaru Hori
Takayuki Goto
Keywords:
Magnet
Raman spectroscopy
Surface roughness
Ion
Nuclear magnetic resonance
Chemistry
Correction
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