ZnO Nanotube Deposited by MOCVD Method and Its Optical Properties
2007
The ZnO films were deposited by metal organic compound vapor deposition(MOCVD) method on substrate Al2O3(1 1 0).The film with nanotube structure was obtained at deposition temperature 450℃ and pressure 40 Pa.The structure and optical properties were investigated by XRD and PL spectrum.
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