Superhydrophobic carbonous surfaces production by PECVD methods

Abstract The paper presents the results of a complex study of superhydrophobic surfaces obtained by PECVD methods in RF discharge plasma with gas mixtures (Ar/CH4 and Ar/C2H2) and by plasma jet (Ar/CH4). In both experiments hydrophobic surfaces were obtained by deposition of carbon nanoparticles on glass and silicon substrates by plasma of Ar (93%) + CH4 (7%) and Ar (93%) + C2H2 (7%) gas mixtures. To compare surfaces with high hydrophobicity produced by the above two methods their contact angles were studied. The dependence of changes in the contact angle on the storage time of the samples under normal conditions show that samples obtained in Ar/CH4 plasma and plasma jet at atmospheric pressure are much better preserved.