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Fabrication of Micromechanical Structures in Silicon for Optical Analysis in Microfluidics
Fabrication of Micromechanical Structures in Silicon for Optical Analysis in Microfluidics
1996
P. Uotila
T. Siirtola
Anssi Hovinen
Pekka Kuivalainen
A. Lehto
Keywords:
Fabrication
Nanotechnology
Silicon
Micromechanics
Microfluidics
Materials science
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