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Acemap > Paper > Effects of annealing temperature on workfunction of MoO x at MoO x /SiO2 interface and process-induced damage in indium tin oxide/MoO x /SiO x /Si stack

Effects of annealing temperature on workfunction of MoO x at MoO x /SiO2 interface and process-induced damage in indium tin oxide/MoO x /SiO x /Si stack

2018 
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