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OS0107 Measurement of the friction force between PVA roller brushes and semiconductor wafers with various films in chemicals
OS0107 Measurement of the friction force between PVA roller brushes and semiconductor wafers with various films in chemicals
2016
Kenya Nishio
Toshiyuki Sanada
Satomi Hamada
Hirokuni Hiyama
Akira Fukunaga
Keywords:
Wafer
Semiconductor
Composite material
Materials science
friction force
Correction
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