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Poly(3-allyl-7,7-dimethyl-oxepan-2-one-co-maleic anhydride) for a 193-nm photoresist
Poly(3-allyl-7,7-dimethyl-oxepan-2-one-co-maleic anhydride) for a 193-nm photoresist
2001
Jae Jun Lee
Kwan-Gu Lee
Jin-Baek Kim
Keywords:
Maleic anhydride
Photoresist
Organic chemistry
Chemistry
Polymer chemistry
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