Old Web
English
Sign In
Acemap
>
Paper
>
Controllable Patterning of Hybrid Silicon Nanowire and Nanohole Arrays by Laser Interference Lithography
Controllable Patterning of Hybrid Silicon Nanowire and Nanohole Arrays by Laser Interference Lithography
2020
Xudong Guo
Songhao Li
Zecheng Lei
Ri Liu
Li Li
Lu Wang
Litong Dong
Kui-Qing Peng
Zuobin Wang
Keywords:
Condensed matter physics
Nanolithography
Optoelectronics
laser interference lithography
Chemistry
silicon nanostructures
Nanohole
silicon nanowires
Correction
Source
Cite
Save
Machine Reading By IdeaReader
33
References
3
Citations
NaN
KQI
[]