The Microstructure and Mechanical Properties of Ti/TiN Multilayer Film Synthesized by Unbalanced Magnetron Sputtering Deposition on 17-4PH Stainless Steel

Ti/TiN multilayer films were synthesized on 17-4PH stainless steel using unbalanced magnetron sputtering. The modulation periods is ranged from 100nm to 350 nm. The microstructure of the multilayer films was analyzed by X-ray diffraction. The cross-section views of the multilayer films were studied by scanning electron microscope (SEM). The microhardness and wear resistance of the films were measured by a HXD-1000 microhardness tester and ball-on-disk wear tester. The corrosion resistance of the multilayer films was evaluated by potentiodynamic polarization scans in a 3% NaCl solution. The results showed that there was TiNx intergradation layer in the films. The microhardness and the wear resistance of the multilayer films increased with the layer number. The Ti/TiN multilayer can improve the corrosive resistance of the 17-4PH stainless steel.