Submicron-Size Fabrication of Bi 2Sr 2CaCu 2Ox Thin Films by Utilizing Facet Growth

Submicron-size Bi2Sr2CaCu2Ox (BSCCO) structures of mesa patterns with dimensions of 0.5 µm × 0.5 µm × 0.07 µm and line patterns of 0.3 µm width were fabricated on patterned SrTiO3 (001) substrates. These fine structures were obtained from the growth properties of the crystal, which favor the formation of (100), (010), (110) and (110) facets. The c-axis oriented epitaxial BSCCO thin films were prepared by the molecular beam epitaxy (MBE) method on patterned SrTiO3 (001) substrates directly written by a 30 kV Ga focused ion beam.