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Industrial Deposition of PECVD AlOx for Rear Passivation of PERC Type mc-Si Solar Cells
Industrial Deposition of PECVD AlOx for Rear Passivation of PERC Type mc-Si Solar Cells
2010
R. Preu
M. Hofmann
C. Schetter
Pierre Saint-Cast
D. Kania
N. Kohn
H.-P. Sperlich
Jochen Rentsch
Keywords:
Passivation
Plasma-enhanced chemical vapor deposition
Metallurgy
Materials science
Deposition (law)
Correction
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