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A simple model for dry oxidation of silicon ion implanted with high doses of arsenic
A simple model for dry oxidation of silicon ion implanted with high doses of arsenic
1992
R. Marinescu
A. Silard
Keywords:
Ion implantation
Polymer
Single crystal
Doping
Ion
Silicon
Chemistry
Inorganic chemistry
Arsenic
Nuclear chemistry
Chemical engineering
Metallurgy
high doses
Materials science
kinetic model
Correction
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