A process for producing a silicon solar cell

A process for producing a silicon solar cell produced in a surface of a silicon substrate by doping the emitter and the emitter locally provided metal contact regions, wherein a dopant source material surface. coated on the substrate surface and a first dopant drive-in step executed, and then patterned the layer of dopant source material in accordance with the intended metal contact regions and a second dopant drive-in step is carried out in the structured state, wherein for passivation of the emitter a formed in the second dopant drive-oxide layer at least left with a part of its thickness to the emitter and a nitride layer is deposited on the remaining oxide.