Hot electrostatic chuck having a real-time heating zone adjustment function

Embodiments of the present invention provides an electrostatic chuck for operating at high temperatures. One embodiment of the present invention to provide a dielectric chuck body for the electrostatic chuck. The dielectric chuck body includes a top surface for receiving a substrate, a substrate support plate having a rear surface opposite to the upper surface, and an electrode embedded in the substrate support plate, the first end attached to the rear surface of the substrate support plate If, comprising a shaft having a second end opposite the first end. The second end contacts the cooling base, configured to provide temperature control of the substrate support plate. Shaft is hollow and a side wall surrounding a central aperture, formed through the side wall, having two or more channels extending from the first end to the second end.