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Ultraviolet Nanoimprint Lithography
Ultraviolet Nanoimprint Lithography
2013
Jun Taniguchi
Noriyuki Unno
Hidetoshi Shinohara
Jun Mizuno
Hiroshi Goto
Nobuji Sakai
Kentaro Tsunozaki
Hiroto Miyake
Norio Yoshino
Kenichi Kotaki
Keywords:
Ultraviolet
Nanoimprint lithography
Photochemistry
Materials science
Polymerization
Optoelectronics
transfer mechanism
Correction
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