Estimating the uncertainties of strain and damage analysis by X-ray diffraction in ion implanted MoO3

Abstract Ion implantation of oxygen in MoO3 lamellar crystals allows tuning their electrical conductivity by defect formation. X-ray diffraction (XRD) is a particularly sensitive technique to study such defects that cause changes in the lattice parameters and crystal quality. In this work, dynamical theory was applied to fit XRD patterns to obtain the strain and static Debye-Waller (DW) factor distributions as a function of depth. A two-step method was tested to estimate the uncertainties of these parameters within a certain region of interest. The limitations of the XRD characterization to study regions with low values of static DW factor are discussed.