Improved structural and electrical properties of thin ZnO:Al films by dc filtered cathodic arc deposition

Submitted to the Journal of Materials Research original version 2011-08-23 revised version of 2011-09-23 accepted 2011-09-26 online 2011-11-07 published in the 2012-03-14 issue of the journal: J. Mater. Res., vol. 27, pp. 857-862, 2012. http://dx.doi.org/10.1557/jmr.2011.342 Improved structural and electrical properties of thin ZnO:Al films by dc filtered cathodic arc deposition Yuankun Zhu, a, b  Rueben J. Mendelsberg, b,c Sunnie H.N. Lim, b Jiaqi Zhu, a Jiecai Han, a and Andre Anders b a b Harbin Institute of Technology, Harbin 150080, People’s Republic of China Lawrence Berkeley National Laboratory, Plasma Applications Group, Berkeley, California, 94720 c Lawrence Berkeley National Laboratory, Molecular Foundry, Berkeley, California, 94720 ACKNOWLEDGMENT The authors would like to thank J. Wallig, K.M. Yu, and D.J. Milliron for their contributions to this work. Research was supported by the LDRD Program of Lawrence Berkeley National Laboratory, by the Assistant Secretary for Energy Efficiency and Renewable Energy, Office of Building Technologies under U.S. Department of Energy Contract No. DE-AC02-05CH11231. Portions of this work were performed as a User Project at the LBNL Molecular Foundry, which is supported by the Office of Science, Office of Basic Energy Sciences, under the same contract. DISCLAIMER This document was prepared as an account of work sponsored by the United States Government. While this document is believed to contain correct information, neither the United States Government nor any agency thereof, nor The Regents of the University of California, nor any of their employees, makes any warranty, express or implied, or assumes any legal responsibility for the accuracy, completeness, or usefulness of any information, apparatus, product, or process disclosed, or represents that its use would not infringe privately owned rights. Reference herein to any specific commercial product, process, or service by its trade name, trademark, manufacturer, or otherwise, does not necessarily constitute or imply its endorsement, recommendation, or favoring by the United States Government or any agency thereof, or The Regents of the University of California. The views and opinions of authors expressed herein do not necessarily state or reflect those of the United States Government or any agency thereof or The Regents of the University of California. Electronic address: yuan.kun.zhu@gmail.com