Semiconductor capacitance-type accelerometer with PWM electrostatic servo technique

Abstract A new semiconductor capacitance-type accelerometer utilizing a pulse width modulation (PWM) electrostatic servo technique has been developed. Highly accurate detection of feeble and low frequency acceleration became possible with the PWM sensing method. The limited air gaps between the movable and fixed electrodes ensured compatibility between high sensitivity and durability, while transverse sensitivity was reduced due to the symmetric structure of the sensing part.