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Comparing Magnetron Sputtered ScN Films Grown on Sapphire ((10-10) and (1-102)) Substrates
Comparing Magnetron Sputtered ScN Films Grown on Sapphire ((10-10) and (1-102)) Substrates
2020
Tobin Muratore
Said Elhamri
Amber N. Reed
John S. Cetnar
David C. Look
Kurt G. Eyink
Hadley Smith
Zachary Biegler
Keywords:
Materials science
Optoelectronics
Sapphire
Cavity magnetron
Correction
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