Studies of Interfacial Roughness of GaAs/AlAs Superlattices by Grazing Incidence X-Ray Scattering

A series of type-II GaAs/AlAs superlattices epitaxially grown with different interrupts have been investigated using the techniques of grazing incidence X-ray scattering and diffraction. The interrupts are specifically designed to alter the interfacial roughness in the superlattices for the present study. Various structural parameters including the layer thickness, interfacial roughness, and intra-layer correlation lengths of fluctuations in the quantum-well widths have been determined. These results are compared with measurements made on the same set of samples using photoluminescence and optical imaging techniques.