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A BULK-SILICON CAPACITIVE MICROACCELEROMETER WITH BUILD-IN OVERRANGE AND FORCE FEEDBACK ELECTRODES
A BULK-SILICON CAPACITIVE MICROACCELEROMETER WITH BUILD-IN OVERRANGE AND FORCE FEEDBACK ELECTRODES
1994
K. J. Ma
N Yazdi
K Najafi
Keywords:
Optoelectronics
Materials science
Capacitive sensing
Silicon
Electrode
Haptic technology
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