Method for preparing all-metal microstructure by combining deep ion reaction etching and rolling

The invention discloses a method for processing an all-metal microstructure by combining deep ion reaction etching and rolling. The method comprises the following steps of: sequentially coating a layer of polymethyl methacrylate (PMMA) and a layer of silicon-containing polyurethane acrylate (PUA) on the surface of a substrate (1), rolling the PUA layer by using a homemade rolling device to form a relatively shallow groove, demoulding, then performing ion reaction etching by using the mixed gas of SF6 and O2 as a working gas till the PUA in the groove is etched, performing ion etching on the PMMA layer (3) by separately using O2 as a working gas till the PMMA layer (3) in the groove is etched, and finally performing micro electroforming, degumming and molding. By the method, large-area and repeated production is easily realized, the processing period can be effectively shortened, and the processing cost can be reduced.