Split-gate cavity coupler for silicon circuit quantum electrodynamics

Coherent charge-photon and spin-photon coupling has recently been achieved in silicon double quantum dots (DQDs). Here, we demonstrate a versatile split-gate cavity-coupler that allows more than one DQD to be coupled to the same microwave cavity. Measurements of the cavity transmission as a function of level detuning yield a charge cavity coupling rate of g c / 2 π = 58 MHz, a charge decoherence rate of γ c / 2 π = 36 MHz, and a cavity decay rate of κ / 2 π = 1.2 MHz. The charge cavity coupling rate is in good agreement with device simulations. Our coupling technique can be extended to enable simultaneous coupling of multiple DQDs to the same cavity mode, opening the door to long-range coupling of semiconductor qubits using microwave frequency photons.