Effects of ion implantation on the reaction between water and glass

Abstract The effect of ion implantation on the reaction between water and two glasses (fused silica, a commercial soda-line glass) is investigated. Implantation of noble gas ions is seen to increase dramatically the rate of penetration of water into SiO 2 . The rate of penetration of water (hydrogen) into soda-lime glass is seen to increase and then decrease with implantation dose. Etch rates at 90°C in water and saline for implanted and unimplanted glasses are reported.