Silicon Based Nano-Thermoelectric Bolometers for Infrared Detection

The state-of-the-art infrared (IR) detection uses quantum photodetectors and bolometers. Quantum IR photodetectors are expensive and require cooling, and exotic and toxic materials. Whereas, bolometers are cost-efficient and uncooled, but they are much slower and less sensitive. Recently we have demonstrated that ultra-thin, highly-doped silicon membranes can be used to build fast and highly-sensitive thermoelectric bolometers. We present the fabrication of these devices, electro-thermal characterization results, and estimate the full potential of this technology.