The method of adjusting the shape of the polishing member and the polishing apparatus
2014
A method of adjusting the shape of the polishing member, respectively, in the direction of swinging the dresser (5) is previously set in a plurality of oscillation sections (Z1 ~ Z5) on the polishing member (10) the height of the surface of the polishing member (10) measurements, calculate the current difference between the target shape and the outer shape of the polishing member (10), the current value is obtained in accordance with the shape of the surface height measurement, a plurality of oscillation sections of the wheel (Z1 ~ Z5) of the dressing tool (5) correcting the moving speed to eliminate the difference. According to the present invention can be realized as the outer shape of the polishing target member.
- Correction
- Source
- Cite
- Save
- Machine Reading By IdeaReader
0
References
0
Citations
NaN
KQI