High-precision non-contact measurement method and device for three-dimensional profile of optical freeform curved surface
2011
The invention relates to high-precision in-situ detection for complicated curved-surface parts with high-curvature surface form. In order to provide non-contact for the parts and detection for the surfaces of the parts, the invention provides the following technical scheme, namely a high-precision non-contact measurement method and a high-precision non-contact measurement device for a three-dimensional profile of an optical freeform curved surface. A grating projection device is used for projecting a sine grating stripe onto the surface of a measured object; an image acquisition device acquires a deformed stripe pattern modulated by the surface of the measured object and sends the deformed stripe pattern into a computer to recover the three-dimensional profile of the surface of the measured object; a white light scanning interference measuring head is used for scanning and measuring local characteristics of the measured object in nano-scale precision; a white light scanning image acquisition device acquires an interfered stripe pattern and sends the interfered stripe pattern into the computer to acquire data of the three-dimensional profile of a measurement region; and a result can be obtained according to data obtained by measurement of a grating projection vision detection unit and a white light scanning interference measurement unit through a multi-sensor massive data combination algorithm and corresponding error separation and compensation measures. The invention is mainly applied to the high-precision in-situ detection of the parts.
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