Old Web
English
Sign In
Acemap
>
Paper
>
PECVD of SiOC Films Using a Sheet-type Atmospheric Pressure Plasma Jet
PECVD of SiOC Films Using a Sheet-type Atmospheric Pressure Plasma Jet
2015
Kouta Nakajima
Kenji Tanaka
Tatsuru Shirafuji
Keywords:
Atmospheric-pressure plasma
Analytical chemistry
Plasma-enhanced chemical vapor deposition
Materials science
Composite material
Correction
Source
Cite
Save
Machine Reading By IdeaReader
0
References
0
Citations
NaN
KQI
[]